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13:10
Machine learning aided plasma source and process simulation for semiconductor fabrication processes
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Deukchul Kwon
(Korea Institute of Fusion Energy)
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13:40
Physics-Informed Data Driven Plasma Equipment/Process Control Technologies for Plasma Applications.
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Jung-Sik YOON
(Korea Institute of Fusion Energy)
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14:10
Commercialisation pathways for plasma-activated coatings, plasma immersion ion implantation and plasma-polymerised nanoparticles in biomedical science
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Stuart Fraser
(Culturon Pty Ltd)
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14:25
Material modifications due to the plasma irradiation
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Olga Ogorodnikova
(National Research Nuclear University “MEPHI” (Moscow Engineering Physics Institute))